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"Katsumasa Suzuki,Yoshio Ishihara,Kaoru Sakoda,Yasuyuki Shirai,Akinobu  Teramoto,Masaki Hirayama,Tadahiro Ohmi,Takayuki Watanabe,Takashi Ito","High-Efficiency PFC Abatement System Utilizing High-Efficiency PFC Abatement System Utilizing Immobilization",,"IEEE Trans. on Semicon. Manufacturing","IEEE","Vol. 21","No. 4","pp. 668-675",2008,Nov.
"Tadahiro Ohmi,Hiraku ISHIKAWA,Toshihisa NOZAWA,Takaaki MATSUOKA,Akinobu TERAMOTO,Masaki HIRAYAMA,Takashi ITO,Tadahiro OHMI","Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization",,"Japanese Journal of Applied Physics","The Japan Society of Applied Physics","Vol. 47","No. 4","pp. 2531?2534",2008,Apr.