"Xun Gu,Takenao Nemoto,Akinobu Teramoto,Takashi Ito,Tadahiro Ohmi","Effect of Additives in Organic Acid Solutions for Post-CMP Cleaning on Polymer Low-k Fluorocarbon",,"J. Electrochem. Soc.","J. Electrochem. Soc.","Vol. 156","No. 6","pp. H409-H415",2009,June
"Takenao Nemoto,Hiroshi Imai,Akinobu Teramoto,Takashi Ito,Shigetoshi Sugawa,Tadahiro Ohmi","Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnections",,"Journal of The Electrochemical Society","The Electrochemical Society","Vol. 155","No. 5","pp. H323-H328",2008,Mar.