"Takenao Nemoto,Hiroshi Imai,Akinobu Teramoto,Takashi Ito,Shigetoshi Sugawa,Tadahiro Ohmi","Tantalum Nitride Sputtering Deposition with Xe on Fluorocarbon for Cu Interconnections",,"Journal of The Electrochemical Society","The Electrochemical Society","Vol. 155","No. 5","pp. H323-H328",2008,Mar.