"Tetsu Fukano,Takashi Ito,Tokushige Hisatsugu,Hajime Ishikawa","Ultra Sharp Trench Capacitors Formed by Peripheral Etching","Ext. Abst. of 16th (1984 International Conf. on SSDM","Ext. Abst. of 16th (1984 International Conf. on SSDM",,,,"pp. 471-472",1984,