"Fumio Sugimoto,Hiroshi Horie,Yoshihiro Arimoto,Takashi Ito","A pH-  Controlled Chemical Mechanical Polishing Method for Ultra-Thin Bonded SOI  Wafer","Dig. of Tech. Papers, Symp. on VLSI Tech.","Dig. of Tech. Papers, Symp. on VLSI Tech.",,,,"pp. 113-114",1993,