"Jun Kanehara,Yusuke Takei,Youhei Miyata,Hiroshi Nohira,Y. Izumi,TAKAYUKI MURO,木下豊彦,パールハットアヘメト,Kuniyuki KAKUSHIMA,KAZUO TSUTSUI,takeo hattori,HIROSHI IWAI","Depth Profiling of As with Various Chemical Bonding States Doped in Si Shallow Junction by Using Soft X-ray Photoelectron Spectroscopy","G-COE PICE International Symposium and IEEE EDS Minicolloquium on Advanced Hybrid Nano Devices: Prospects by World’s Leading Scientists",,,,,,2013,