"Hiroshi Nohira,�����V,�R���W�i,Kuniyuki KAKUSHIMA,HIROSHI IWAI,Y. Hioshi,K. Sawano,Y. Shiraki","XPS Study on Chemical Bonding States of high-k/high-�� Gate Stacks for Advanced CMOS","ECS 220th Meeting","ECS Transactions",,"Vol. 41","No. 7","pp. 137-146",2011,