"Tetsuya Miyazawa,Yu Kano,Yasuo Nakayama,KENICHI OZAWA,Toshiharu Iga,Misao Yamanaka,Ayako Hashimoto,Takashi Kikuchi,Kazuhiko Mase","Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen",,"Journal of Vacuum Science & Technology A","AIP Publishing","Vol. 37","No. 2",,2019,Jan.