"Tomoya Tsutsumi,Kazuki Goshima,Yoshiharu Kirihara,Tatsuki Okazaki,Akira Yasui,Mitani Yuichiro,Kuniyuki KAKUSHIMA,Hiroshi Nohira","Effects of plasma oxidation and plasma nitridation on chemical bonding state of AlScN evaluated by AR-HAXPES",,,,,,,2024,Apr.