"H. Akatsuka,S. Watanabe,K. Doi,T. Kiyota,Y. Yamashita,W. Kikuchi,K. Ishi,Y. Ye,A. Nezu","Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP","The 45th International Symposium on Dry Process (DPS2024)","Proc. DPS2024","International Symposium on Dry Process Organizing Committee",,,"pp. 81-82",2024,Nov.
"J. Enomoto,W. Kikuchi,T. Taguchi,Y. Yamashita,A. Nezu,H. Akatsuka","Optical Emission Spectroscopy Measurement of Atmospheric Pressure Plasma Jet Considering Ionic Continuum Spectrum","The 41st annual meeting of The Japan Society of Plasma Science and Nuclear Fusion Research","Extended Abstracts of the 41st Annual Meeting of JSPF","The Japan Society of Plasma Science and Nuclear Fusion Research",,,,2024,Nov.
"山下 雄也,土居 謙太,清田哲司,叶宇晨,島谷和希,何文涛,羽生陽向,菊地航行,櫻井彩貴,根津篤,赤塚洋","トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断","第85回応用物理学会秋季学術講演会","第85回応用物理学会秋季学術講演会 講演要旨集","公益社団法人 応用物理学会",,,,2024,Sept.
"Wataru Kikuchi,Yuya Yamashita,Atsushi Nezu,Hiroshi Akatsuka","Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Continuum and Line Spectra with Weighted Analysis","The 5th International Conference on Data-Driven Plasma Science (ICDDPS-5)","Proc. ICDDPS-5",,,,,2024,Aug.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Wataru Kikuchi,Yuchen Ye,Atsushi Nezu,Hiroshi Akatsuka","Electron temperature diagnosis of CF4/O2 plasma  based on fluorine atomic corona model  by tomographic optical emission spectroscopic measurement","ESCAMPIG (Europhysics Conference on Atomic and Molecular Physics of Ionized Gases) 2024","Proceedings of ESCAMPIG2024","Department of Plasma Physics and Technology of Masaryk University (MUNI)",,,,2024,July
"Wataru Kikuchi,Yuya Yamashita,Atsushi Nezu,Hiroshi Akatsuka","Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Line Spectra with Undetected Level Densities","50th EPS Conference on Plasma Physics","Proceedings of 50th EPS Conference on Plasma Physics","EPS",,,,2024,July
"Wataru Kikuchi,Yuya Yamashita,Atsushi Nezu,Hiroshi Akatsuka","Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra",,"Journal of Physics D: Applied Physics","IOP Publishing","Vol. 57","Issue 33","p. 335202",2024,May
"山下 雄也,土居 謙太,清田 哲司,渡邊 修平,島谷 和希,菊地 航行,根津 篤,赤塚 洋","トモグラフィック発光分光計測によるフッ素原子コロナモデルに基づくCF4/O2プラズマの電子温度診断","第71回応用物理学会春季学術講演会","第71回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"p. 07-009",2024,Mar.
"Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma","ISPlasma2024/IC-PLANTS2024/APSPT-13","Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13","Organizing Committee of ISPlasma2024/IC-PLANTS2024/APSPT-13",,,,2024,Mar.
"菊地 航行,山下 雄也,根津 篤,赤塚 洋","大気圧非平衡 Ar プラズマの連続・線スペクトルに基づいた重み付き解析","第71回応用物理学会春季学術講演会","第71回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"p. 07-003",2024,Mar.
"渡邊修平,土居謙太,清田哲司,山下雄也,菊地航行,石健太,根津篤,赤塚洋","誘導結合酸素プラズマの発光分光計測","第41回プラズマプロセシング研究会","第41回 プラズマプロセシング研究会 プロシーディングス","応用物理学会プラズマエレクトロニクス分科会",,,"pp. 82 - 83",2024,Jan.
"石健太,土居謙太,清田哲司,山下雄也,米田和真,渡邊修平,島谷和希,根津篤,赤塚洋","誘導結合窒素プラズマ中の励起状態数密度と電子温度の関係性に関する議論","第41回プラズマプロセシング研究会","第41回 プラズマプロセシング研究会 プロシーディングス","応用物理学会プラズマエレクトロニクス分科会",,,"pp. 30-31",2024,Jan.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Kenta Ishi,Shuhei Watanabe,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model",,"J. Vac. Sci. Technol. A","AIP Publishing","Vol. 42","No. 2","  023003",2024,Jan.
"山下雄也,土居謙太,清田哲司,菊地航行,石健太,渡邊修平,根津篤,赤塚洋","改良分光トモグラフィアルゴリズムによるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断","第41回 プラズマプロセシング研究会","第41回 プラズマプロセシング研究会 プロシーディングス","応用物理学会プラズマエレクトロニクス分科会",,,"pp. 64 - 65",2024,Jan.
"Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Ayaki Sakurai,Yuya Yamashita,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements","The 41st annual meeting of The Japan Society of Plasma Science and Nuclear Fusion Research","Extended Abstracts of the 41st Annual Meeting of JSPF","The Japan Society of Plasma Science and Nuclear Fusion Research",,,,2024,
"菊地航行,榎本 純,山下 航平,山下 雄也,根津 篤,赤塚洋","大気圧非平衡Arプラズマの連続・線スペクトルの両者による発光分光計測","2023年合同素過程研究会  「プラズマの分光診断と原子分子素過程の研究フロンティア」 「原子分子データ応用フォーラムセミナー」","2023年「原子分子データ応用フォーラムセミナー」要旨集","原子分子データ応用フォーラム",,,,2023,Dec.
"山下雄也,土居謙太,清田哲司,菊地航行,石健太,渡邊修平,根津篤,赤塚洋","トモグラフィック発光分光計測とアルゴン衝突輻射モデルによるプラズマ診断において視線配置が診断結果に及ぼす影響","2023年合同素過程研究会  「プラズマの分光診断と原子分子素過程の研究フロンティア」 「原子分子データ応用フォーラムセミナー」","原子分子データ応用フォーラム要旨集","原子分子データ応用フォーラム",,,,2023,Dec.
"K. Ishi,K. Yoneda,Y. Yamashita,A. Nezu,H. Akatsuka","Discussion on Number Densities of Excited States and Gas Temperature in Inductively Coupled Nitrogen Plasma","The 13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)","E-Abstract book of The 13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)","International Program Committee of AEPSE2023",,,"p. 140",2023,Nov.
"菊地 航行,榎本 純,山下 航平,山下 雄也,根津 篤,赤塚 洋","大気圧非平衡Arプラズマの制動輻射と衝突輻射モデルに基づいた解析","2023年第84回応用物理学会秋季学術講演会","第84回応用物理学会秋季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"  07-135",2023,Sept.
"山下 雄也,土居 謙太,清田 哲司,菊地 航行,石 健太,渡邊 修平,根津 篤,赤塚 洋","トモグラフィック発光分光計測によるプラズマ診断におけるチャンバ内壁反射光が電子温度・電子密度診断に及ぼす影響","2023年第84回応用物理学会秋季学術講演会","第84回応用物理学会秋季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"  07-147",2023,Sept.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Keiichiro Asakawa,Sotaro Hosoya,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation",,"Review of Scientific Instruments","AIP Publishing","Vol. 94","Issue 8","  083503",2023,Aug.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Keiichiro Asakawa,Sotaro Hosoya,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Diagnosis of spatial distribution of electron temperature and electron density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement","35th International Conference on Phenomena in Ionized Gases (ICPIG XXXV)","Program-book-abstracts of ICPIG XXXV","International Scientific Committee of 35th International Conference on Phenomena in Ionized Gases",,,"p. 240",2023,July
"Wataru Kikuchi,Jun Enomoto,Kohei Yamashita,Yuya Yamashita,Atsushi Nezu,Hiroshi Akatsuka","Estimation of atmospheric-pressure non-equilibrium Ar plasma EEDF using optical emission spectroscopy and linear combination of generalized EEDF","25th International Symposium on Plasma Chemistry (ISPC25)","Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25)","International Organizing Committee of ISPC25",,,,2023,May
"米田 和真,山下 雄也,土居 謙太,清田 哲司,浅川 慶一郎,石 健太,根津 篤,赤塚 洋","トモグラフィック発光分光計測による窒素誘導結合プラズマの振動温度・回転温度の空間分布診断","2023年第70回応用物理学会春季学術講演会","2023年第70回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"  07-008",2023,Feb.
"山下 雄也,土居 謙太,清田 哲司,浅川 慶一郎,細谷 宗太郎,菊地 航行,根津 篤,赤塚 洋","トモグラフィック発光分光計測によるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断","2023年第70回応用物理学会春季学術講演会","2023年第70回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"  07-007",2023,Feb.
"小林 明,山下 雄也,砂川 晃伯,米田 和真,清田 哲司,土居 謙太,根津 篤,赤塚 洋","発光分光診断による CF B−X 遷移の振動温度の推定","2023年第70回応用物理学会春季学術講演会","2023年第70回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"  07-002",2023,
"K. Yoneda,Y. Yamashita,K. Doi,T. Kiyota,K. Asakawa,K. Ishi,A. Nezu,H. Akatsuka","Spatial distribution of vibrational and rotational temperatures of N2 ICP by tomographic optical emission spectroscopic measurement","35th International Conference on Phenomena in Ionized Gases (ICPIG XXXV)","Program-book-abstracts of ICPIG XXXV","International Scientific Committee of 35th International Conference on Phenomena in Ionized Gases",,,"p. 285",2023,
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Sotaro Hosoya,Atsushi Nezu,Hiroshi Akatsuka","Diagnosis of argon inductively coupled plasma by optical emission spectroscopic measurement with compensation of spectral reflectance on chamber inner wall","43rd International Symposium on Dry Process (DPS2022)","Proc. 43rd International Symposium on Dry Process (DPS2022)","Program Committee of 43rd International Symposium on Dry Process (DPS2022)",,,"pp. 47-48",2022,Nov.
"Yuya YAMASHITA,Kenta DOI,Tetsuji KIYOTA,Akira KOBAYASHI,Sotaro HOSOYA,Kazuma YONEDA,Atsushi NEZU,Hiroshi AKATSUKA","Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model","2022 Gaseous Electronics Conference (GEC 2022)/ 11th International Conference on Reactive Plasmas (ICRP-11)","Proc. ICRP-11/GEC2022","ICRP-11 / GEC-2022",,,"pp. 141-142",2022,Oct.
"Yuya Yamashita,Takuya Akiba,Toshihide Iwanaga,Shuichi Date,Hidehiko Yamaoka,Hiroshi Akatsuka","Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model",,"IEEE Transactions on Plasma Science","IEEE","Vol. 50","Issue 6","pp. 1875 - 1889",2022,May
"山下 雄也,伊達 修一,山岡 英彦,秋葉 拓也,澁谷 孝幸,岩永 敏秀,赤塚洋","アルゴン-酸素低気圧誘導結合プラズマのOHラジカルの振動温度・回転温度の診断","2022年第69回応用物理学会春季学術講演会","第69回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"p. 7-009",2022,Feb.
"Yuya Yamashita,Takuya Akiba,Toshihide Iwanaga,Shuichi Date,Hidehiko Yamaoka,Hiroshi Akatsuka","The plasma diagnosis of 133 Pa argon microwave discharge plasma by optical emission spectroscopic measurement based on systematic excitation-kinetics analysis","42nd International Symposium on Dry Process","Proceedings of 42nd International Symposium on Dry Process","Program Committee of 42nd International Symposium on Dry Process",,,"pp. 57-58",2021,Nov.
"山下 雄也,秋葉 拓也,岩永 敏秀,伊達 修一,山岡 英彦,赤塚 洋","エッチング装置で生成したアルゴン低気圧誘導結合プラズマの発光分光計測による電子温度・電子密度・電子エネルギー分布関数診断","第82回応用物理学会秋季学術講演会","第82回応用物理学会秋季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"  07-002",2021,Aug.
"Yuya Yamashita,Takuya Akiba,Toshihide Iwanaga,Hidehiko Yamaoka,Shuichi Date,Hiroshi Akatsuka","Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model",,"Japanese Journal of Applied Physics","IOP Science","Vol. 60",,"pp. 046003-1 - 046003-11",2021,Mar.
"山下 雄也,秋葉 拓也,岩永 敏秀,山岡 英彦,伊達 修一,赤塚 洋","表面クリーニング用大気圧アルゴンプラズマジェットの発光分光計測による電子温度・電子密度診断","2021年第68回応用物理学会春季学術講演会","第68回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,"No. 8.1","p. 07-043",2021,Feb.
"山下 雄也,秋葉 拓也,岩永 敏秀,山岡 英彦,伊達 修一,赤塚 洋","衝突輻射モデルおよび多数発光線解析に基づく診断モデル最適化アルゴリズムの開発と課題","2020年第81回応用物理学会秋季学術講演会","第81回応用物理学会秋季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"p. 07-012",2020,Aug.
"山下雄也,赤塚洋","Global-modelおよび衝突輻射モデルにもとづくアルゴンプラズマの励起状態数密度分布の電子密度、電子温度および電子エネルギー分布関数依存性","「フ?ラス?マ分光計測と原子分子素過程研究の融合最前線」「原子分子データ応用フォーラムセミナー」 合同研究会","「フ?ラス?マ分光計測と原子分子素過程研究の融合最前線」 「原子分子データ応用フォーラムセミナー」 合同研究会要旨集","原子分子データ応用フォーラム",,,,2019,Dec.
"山下雄也,赤塚 洋","発光分光計測による電子エネルギー分布関数診断にむけた低気圧マイクロ波放電アルゴンプラズマの励起状態分布の解析","第80回応用物理学会秋季学術講演会","第80回応用物理学会秋季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"p. 07-082",2019,Sept.
"Yuya Yamashita,Fuminori Yamazaki,Atsushi Nezu,Hiroshi Akatsuka","Diagnostics of low-pressure discharge argon plasma by multi-optical emission line analysis based on the collisional-radiative model",,"JPN. J. APPL. PHYS.","IOP Science","Vol. 58","No. 1","  016004",2019,Jan.
"山下雄也,山崎文徳,根津篤,赤塚洋","衝突輻射モデルに基づく多数発光線解析によるマイクロ波放電低気圧アルゴンプラズマ診断","2018第65回応用物理学会春季学術講演会","第65回応用物理学会春季学術講演会講演予稿集","公益社団法人応用物理学会",,,"p. 07-023",2018,Mar.
"山下雄也","衝突輻射モデルに基づく多数発光線解析による低気圧アルゴンプラズマ診断",,,,,,,2018,Mar.
"Yuya Yamashita,Hiroshi Akatsuka","Excitation-kinetic model for argon processing plasma diagnostics by optical emission spectroscopic measurement based on collisional-radiative model","39th International Syhmposium on Dry Process","Proceedings of International Syhmposium on Dry Process","International Syhmposium on Dry Process Organizing Committees",,,"pp. 83 - 84",2017,Nov.
"山下雄也,赤塚洋","衝突輻射モデルに基づく発光分光計測によるアルゴンプロセスプラズマの診断のための原子過程モデル","第78回応用物理学会秋季学術講演会","第78回応用物理学会秋季学術講演会講演予稿集","公益社団法人応用物理学会",,,"p. 07-007",2017,Aug.
"山下雄也,清水大雅,鮫島俊之","電子ビーム蒸着と高圧水蒸気熱処理によるアモルファスシリコン薄膜の消光係数の低減","第3回集積光デバイスと応用技術研究会",,,,,"pp. 27-28",2016,Mar.
"山下雄也","電子ビーム蒸着と高圧水蒸気熱処理による低損失アモルファスシリコン光導波路作製プロセス",,,,,,,2016,Mar.
"冨田昌吾,山下雄也,辻琢人","固相拡散源で形成した拡散層を有する太陽電池の作製と評価","平成25年度電子情報通信学会東海支部卒業研究発表会","平成25年度電子情報通信学会東海支部卒業研究発表会論文集",,,,"p. 61",,