"H. Kozako,J. Sakurai,N. Mukai,Y. Ohnuma,T. Takahashi,S. Hata","Corrosion resistance consolidation of a diaphragm type vacuum sensor","The 25th IEEE Int. Conf. MEMS 2011","The 25th IEEE Int. Conf. MEMS 2011",,,,"pp. 400-403",2011,Jan.