@article{CTT100650821,
  author = {Yusaburo Ono and Yushi Kato and Yasuyuki Akita and Makoto Hosaka and Naoki Shiraishi and Makoto Yamaguchi and Osami Sakata},
  title = {Fabrication of Electrically Active Si-based Thin Films by Pulsed Laser Deposition of SiO/C Dual Targets},
  journal = {Mater. Res. Soc. Symp. Proc.},
  year = 2009,
}