@inproceedings{CTT100591879,
  author = {Sen Yao and Shunji Goto and Ryo Tanabe and Tadahiko Shinshi and Minoru Uehara and Hitoshi Yamamoto},
  title = {Positioning Control of a Cantilever Type Micro Actuator Using High-performance NdFeB/Ta Thin Film Magnets and Built-in Displacement Sensor},
  booktitle = {Proceedings of the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment},
  year = 2009,
}

@inproceedings{CTT100592066,
  author = {田辺 亮 and 後藤駿治 and ＳＥＮ ＹＡＯ and 進士忠彦 and 上原稔 and 山本日登志},
  title = {高性能薄膜ネオジム永久磁石を用いた２自由度駆動型マイクロアクチュエータ},
  booktitle = {第21回｢電磁力関連のダイナミクス｣シンポジウム講演論文集},
  year = 2009,
}

@inproceedings{CTT100591958,
  author = {後藤俊治 and 田辺亮 and Yao Sen and 櫻井淳平 and 進士忠彦 and 上原 稔 and 山本 日登志},
  title = {高性能薄膜ネオジム永久磁石を用いた片持ばり型マイクロアクチュエータの変位測定と位置決め制御},
  booktitle = {2009年度精密工学会春季大会学術講演会講演論文集},
  year = 2009,
}

@inproceedings{CTT100569827,
  author = {Sen Yao and Shunji Goto and Junpei Sakurai and TADAHIKO SHINSHI and Minoru Uehara and Hitoshi Yamamoto},
  title = {SiN-based Micro Cantilever Actuators Using NdFeB/Ta Permanent Magnetic Thin Film},
  booktitle = {The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
  year = 2009,
}

@inproceedings{CTT100569927,
  author = {上原稔 and 後藤駿治 and Sen Yao and 進士忠彦 and 櫻井淳平 and 上原稔 and 山本日登志},
  title = {薄膜ネオジム磁石を用いたマイクロアクチュエータの試作と位置決め制御},
  booktitle = {電磁現象および電磁力に関するコンファレンス講演論文集},
  year = 2008,
}

@inproceedings{CTT100570410,
  author = {Sen Yao and Shunji Goto and Junpei Sakurai and Tadahiko Shinshi and Minoru Uehara},
  title = {Micro Cantilever Type Magnetic Actuators Using NdFeB Thin Film},
  booktitle = {2008年度精密工学会秋季大会学術講演会講演論文集},
  year = 2008,
}