@inproceedings{CTT100696651, author = {Akira Funahashi and Ryota Takamura and Ikuo Azuma and Eiji Sasamoto and Junko Hieda and Hiroki Akasaka and Naoto Ohtake}, title = {Large Scale Deposition of DLC Films at Sub-atmospheric Pressure}, booktitle = {}, year = 2015, } @inproceedings{CTT100684319, author = {舩橋 輝 and 髙村瞭太 and 東 征男 and 笹本栄二 and 赤坂大樹 and 竹尚登}, title = {準大気圧下での大面積DLC合成法の開発}, booktitle = {2015年度精密工学会春季大会アブストラクト集}, year = 2015, }