@inproceedings{CTT100608061,
  author = {Cheol-hyun Lim and Tatsuya Hoshino and Jun-ichi Hanna},
  title = {Direct deposition technique for poly-SiGe thin film achieving a mobility exceeding 20 cm2/Vs with ~30 nm thick bottom-gate TFTs},
  booktitle = {IMID 2009 Digest},
  year = 2009,
}