@article{CTT100901528,
  author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Keiichiro Asakawa and Sotaro Hosoya and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation},
  journal = {Review of Scientific Instruments},
  year = 2023,
}

@inproceedings{CTT100896396,
  author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Keiichiro Asakawa and Sotaro Hosoya and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Diagnosis of spatial distribution of electron temperature and electron density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement},
  booktitle = {Program-book-abstracts of ICPIG XXXV},
  year = 2023,
}

@inproceedings{CTT100887165,
  author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 浅川 慶一郎 and 細谷 宗太郎 and 菊地 航行 and 根津 篤 and 赤塚 洋},
  title = {トモグラフィック発光分光計測によるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断},
  booktitle = {2023年第70回応用物理学会春季学術講演会 講演予稿集},
  year = 2023,
}

@inproceedings{CTT100883993,
  author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Sotaro Hosoya and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Diagnosis of argon inductively coupled plasma by optical emission spectroscopic measurement with compensation of spectral reflectance on chamber inner wall},
  booktitle = {Proc. 43rd International Symposium on Dry Process (DPS2022)},
  year = 2022,
}

@inproceedings{CTT100882444,
  author = {Yuya YAMASHITA and Kenta DOI and Tetsuji KIYOTA and Akira KOBAYASHI and Sotaro HOSOYA and Kazuma YONEDA and Atsushi NEZU and Hiroshi AKATSUKA},
  title = {Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model},
  booktitle = {Proc. ICRP-11/GEC2022},
  year = 2022,
}