論文

• Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, Sotaro Hosoya, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka. Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation, Review of Scientific Instruments, AIP Publishing, Vol. 94, Issue 8, 083503, Aug. 2023.  公式リンク  
  

国際会議発表 (査読有り)

• Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, Sotaro Hosoya, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka. Diagnosis of spatial distribution of electron temperature and electron density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement, 35th International Conference on Phenomena in Ionized Gases (ICPIG XXXV), Program-book-abstracts of ICPIG XXXV, International Scientific Committee of 35th International Conference on Phenomena in Ionized Gases, p. 240, July 2023.  公式リンク  
  
• Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Sotaro Hosoya, Atsushi Nezu, Hiroshi Akatsuka. Diagnosis of argon inductively coupled plasma by optical emission spectroscopic measurement with compensation of spectral reflectance on chamber inner wall, 43rd International Symposium on Dry Process (DPS2022), Proc. 43rd International Symposium on Dry Process (DPS2022), Program Committee of 43rd International Symposium on Dry Process (DPS2022), pp. 47-48, Nov. 2022.  公式リンク  
  
• Yuya YAMASHITA, Kenta DOI, Tetsuji KIYOTA, Akira KOBAYASHI, Sotaro HOSOYA, Kazuma YONEDA, Atsushi NEZU, Hiroshi AKATSUKA. Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model, 2022 Gaseous Electronics Conference (GEC 2022)/ 11th International Conference on Reactive Plasmas (ICRP-11), Proc. ICRP-11/GEC2022, ICRP-11 / GEC-2022, pp. 141-142, Oct. 2022.  公式リンク  
  

国内会議発表 (査読なし・不明)

• 山下 雄也, 土居 謙太, 清田 哲司, 浅川 慶一郎, 細谷 宗太郎, 菊地 航行, 根津 篤, 赤塚 洋. トモグラフィック発光分光計測によるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断, 2023年第70回応用物理学会春季学術講演会, 2023年第70回応用物理学会春季学術講演会 講演予稿集, 公益社団法人 応用物理学会, 07-007, Feb. 2023.  公式リンク  
  

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