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和泉慶彦 研究業績一覧 (1件)
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国際会議発表 (査読有り)
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K. Kakushima,
J. Kanehara,
Y. Izumi,
T. Muro,
T. Kinoshita,
P. Ahmet,
K. Tsutsui,
T. Hattori,
H. Iwai.
Concentration Depth Profiling of Heavily Doped Boron at and near SiO2/Si Interface by Angle-resolved Soft X-ray Photoelectron Spectroscopy,
2011 Int. Conf. on Solid State Devices and Materials (SSDM 2011),
Sept. 2011.
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