@article{CTT100677859, author = {Takumi Tsumura and Hayato Yoshioka and Hidenori Shinno and Hiroshi Sawano}, title = {Magnetically preloaded aerostatic guideway for high speed nanometer positioning}, journal = {Journal of Advanced Mechanical Design, Systems, and Manufacturing}, year = 2014, } @inproceedings{CTT100684128, author = {津村 拓実 and 澤野 宏 and 吉岡 勇人 and 新野 秀憲}, title = {気液二層潤滑による空気静圧軸受の高剛性化}, booktitle = {2015年度精密工学会春季大会学術講演会講演論文集}, year = 2015, } @inproceedings{CTT100664113, author = {Takumi Tsumura and Hayato Yoshioka and hidenori shinno and sawano hiroshi}, title = {Magnetic Attraction Force-preloaded Aerostatic Guideway for High Speed Nano Positioning System}, booktitle = {Proceedings of The 7th International Conference on Leading Edge Manufacturing in 21st Century}, year = 2013, }