@inproceedings{CTT100926908,
  author = {Junnosuke Furuya and Koki Hihara and Kai Fukuchi and Taiki Osawa and Akane Yaida and AKITOSHI OKINO},
  title = {349 mm linear type atmospheric remote plasma source for large area surface treatment},
  booktitle = {International Journal of Plasma Environmental Science and Technology},
  year = 2025,
}

@inproceedings{CTT100926069,
  author = {Junnosuke Furuya and Taiki Osawa and Akane Yaida and Nobuhiko Nishiyama and AKITOSHI OKINO},
  title = {349 mm atmospheric linear type plasma source for 12-inch semiconductor surface processing},
  booktitle = {},
  year = 2024,
}

@inproceedings{CTT100910953,
  author = {日原弘喜 and 古谷淳之介 and 八井田朱音 and 沖野晃俊 and 西山伸彦},
  title = {異種材料集積光回路作製に向けたパーティクルフリーリニア型プラズマによるシリコンウェハの処理},
  booktitle = {},
  year = 2024,
}

@inproceedings{CTT100911710,
  author = {古谷淳之介 and 日原弘喜 and 八井田朱音 and 浦井一 and 上本道久 and 沖野晃俊},
  title = {生体材料を均一処理するためのリニア型マルチガスプラズマ源の開発},
  booktitle = {},
  year = 2024,
}

@inproceedings{CTT100906628,
  author = {Koki Hihara and Junnosuke Furuya and Akane Yaida and Yusuke Itagawa and Nobuhiro Yoda and Hiroshi Kano and Hajime Urai and Nobuhiko Nishiyama and AKITOSHI OKINO},
  title = {Development of atmospheric linear type plasma for fabrication of photonic biosensor},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100905169,
  author = {Koki Hihara and Junnosuke Furuya and Akane Yaida and AKITOSHI OKINO and Nobuhiko Nishiyama},
  title = {Silicon surface treatment by atmospheric large remote plasma for heterogeneous material integration},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100902580,
  author = {古谷淳之介 and 日原弘喜 and 八井田朱音 and 沖野晃俊},
  title = {12インチの半導体ウェハを親水化処理するためのリニア型大気圧プラズマ装置の開発},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100896381,
  author = {古谷淳之介 and 日原弘喜 and 八井田朱音 and 沖野晃俊},
  title = {大気圧リニア型プラズマ源による銅板の親水化実験},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100896383,
  author = {古谷淳之介 and 日原弘喜 and 八井田朱音 and 沖野晃俊},
  title = {コンタミネーションの少ない大気圧リニア型プラズマの開発},
  booktitle = {},
  year = 2023,
}