@article{CTT100906941, author = {H. Nitta and Y. Takamura and T. Kaneko and S. Nakagawa}, title = {Fabrication and Characterization CoZrO Films Deposited by Facing Targets Reactive Sputtering for Micromagnetic Inductors}, journal = {IEEE Magn. Lett.}, year = 2023, } @article{CTT100905515, author = {Y. Takamura and H. Nitta and K. Kawahara and T. Kaneko and R. Ishido and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa}, title = {Fabrication of CoFeB–SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors}, journal = {IEEE Transactions on Magnetics}, year = 2023, } @inproceedings{CTT100905836, author = {Y. Takamura and H. Nitta and R. Ishido and T. Kaneko and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa}, title = {Research on planar type spiral inductors with facing traget sputtered CoFeB-SiO2 magnetic layers for Power Electronics Circuits}, booktitle = {}, year = 2023, } @inproceedings{CTT100891359, author = {Y. Takamura and H. Nitta and R. Ishido and T. Kaneko and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa}, title = {Simulation and fabrication of planar type spiral inductors with facing target sputtered CoFeB-SiO2 magnetic layers}, booktitle = {}, year = 2023, } @inproceedings{CTT100891358, author = {T. Kaneko and H. Nitta and Y. Takamura and S. Nakagawa}, title = {Fabrication and characterization CoZrO films deposited by facing targets reactive sputtering for micro magnetic inductor}, booktitle = {}, year = 2023, } @inproceedings{CTT100891377, author = {Y. Takamura and H. Nitta and K. Kawahara and T. Kaneko and R. Ishido and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa}, title = {Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors}, booktitle = {Intermag 2023 Digest Book}, year = 2023, } @inproceedings{CTT100887540, author = {仁田帆南 and 金子忠幸 and 河原和馬 and 石戸亮祐 and 宮﨑達也 and 細田尚揮 and 藤﨑敬介 and 中川茂樹 and 高村陽太}, title = {対向ターゲット式スパッタで作製したCoFeB-SiO2薄膜を用いた長方形スパイラルインダクタ}, booktitle = {}, year = 2023, } @inproceedings{CTT100882820, author = {金子忠幸 and 仁田帆南 and 高村陽太 and 中川茂樹}, title = {反応性対向ターゲット式スパッタ法で作製したCoZrO薄膜における 酸素導入量が磁気特性に与える影響}, booktitle = {}, year = 2022, } @inproceedings{CTT100861877, author = {河原和馬 and 金子忠幸 and 安田智貴 and 棚瀬純平 and 高村陽太 and 藤崎敬介 and 中川茂樹}, title = {対向ターゲット式スパッタ法による高周波動作用CoZrO 薄膜の作製}, booktitle = {第45 回日本磁気学会学術講演概要集}, year = 2021, }