@inproceedings{CTT100601061, author = {Chao Yan and Ken Uchida and Shunri Oda}, title = {Design Optimization of MEMS(NEMS) Resonator by 3-D Anisotropic Thermoelastic Modeling}, booktitle = {}, year = 2009, } @inproceedings{CTT100600995, author = {晏超 and 内田 建 and 小田俊理}, title = {MEMS(NEMS) 共振器設計のための体系的最適化法}, booktitle = {}, year = 2009, } @inproceedings{CTT100601394, author = {Chao Yan and Ken Uchida and Shunri Oda}, title = {Design Optimization of MEMS(NEMS) Resonator by 3-D Anisotropic Thermoelastic Modeling}, booktitle = {}, year = 2008, }