@inproceedings{CTT100740909, author = {須藤建瑠 and 桑原新之介 and 矢板潤也 and 岩崎孝之 and 波多野睦子}, title = {高酸素濃度成長を用いたSi(111)上高配向ダイヤ膜の合成}, booktitle = {}, year = 2017, }