@article{CTT100908519,
  author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Kenta Ishi and Shuhei Watanabe and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model},
  journal = {J. Vac. Sci. Technol. A},
  year = 2024,
}

@inproceedings{CTT100927132,
  author = {H. Akatsuka and S. Watanabe and K. Doi and T. Kiyota and Y. Yamashita and W. Kikuchi and K. Ishi and Y. Ye and A. Nezu},
  title = {Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP},
  booktitle = {Proc. DPS2024},
  year = 2024,
}

@inproceedings{CTT100919093,
  author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Yuchen Ye and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Electron temperature diagnosis of CF4/O2 plasma  based on fluorine atomic corona model  by tomographic optical emission spectroscopic measurement},
  booktitle = {Proceedings of ESCAMPIG2024},
  year = 2024,
}

@inproceedings{CTT100910225,
  author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 渡邊 修平 and 島谷 和希 and 菊地 航行 and 根津 篤 and 赤塚 洋},
  title = {トモグラフィック発光分光計測によるフッ素原子コロナモデルに基づくCF4/O2プラズマの電子温度診断},
  booktitle = {第71回応用物理学会春季学術講演会 講演予稿集},
  year = 2024,
}

@inproceedings{CTT100909733,
  author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma},
  booktitle = {Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13},
  year = 2024,
}

@inproceedings{CTT100908457,
  author = {山下雄也 and 土居謙太 and 清田哲司 and 菊地航行 and 石健太 and 渡邊修平 and 根津篤 and 赤塚洋},
  title = {改良分光トモグラフィアルゴリズムによるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断},
  booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス},
  year = 2024,
}

@inproceedings{CTT100908453,
  author = {石健太 and 土居謙太 and 清田哲司 and 山下雄也 and 米田和真 and 渡邊修平 and 島谷和希 and 根津篤 and 赤塚洋},
  title = {誘導結合窒素プラズマ中の励起状態数密度と電子温度の関係性に関する議論},
  booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス},
  year = 2024,
}

@inproceedings{CTT100908454,
  author = {渡邊修平 and 土居謙太 and 清田哲司 and 山下雄也 and 菊地航行 and 石健太 and 根津篤 and 赤塚洋},
  title = {誘導結合酸素プラズマの発光分光計測},
  booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス},
  year = 2024,
}

@inproceedings{CTT100927260,
  author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Ayaki Sakurai and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements},
  booktitle = {Extended Abstracts of the 41st Annual Meeting of JSPF},
  year = 2024,
}

@inproceedings{CTT100907445,
  author = {山下雄也 and 土居謙太 and 清田哲司 and 菊地航行 and 石健太 and 渡邊修平 and 根津篤 and 赤塚洋},
  title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルによるプラズマ診断において視線配置が診断結果に及ぼす影響},
  booktitle = {原子分子データ応用フォーラム要旨集},
  year = 2023,
}

@inproceedings{CTT100903448,
  author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 菊地 航行 and 石 健太 and 渡邊 修平 and 根津 篤 and 赤塚 洋},
  title = {トモグラフィック発光分光計測によるプラズマ診断におけるチャンバ内壁反射光が電子温度・電子密度診断に及ぼす影響},
  booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集},
  year = 2023,
}