@article{CTT100736763, author = {Ahmed Awad and Atsushi Takahashi and Satoshi Tanaka and Chikaaki Kodama}, title = {A Fast Process-Variation-Aware Mask Optimization Algorithm With a Novel Intensity Modeling}, journal = {IEEE Transactions on Very Large Scale Integration (VLSI) Systems}, year = 2017, } @article{CTT100735891, author = {Ahmed Awad and Atsushi Takahashi and Satoshi Tanaka and Chikaaki Kodama}, title = {Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement}, journal = {IPSJ Trans. on System LSI Design Methodology}, year = 2017, } @article{CTT100734589, author = {Ahmed Awad and Atsushi Takahashi and Chikaaki Kodama}, title = {A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model}, journal = {IEICE Trans. Fundamentals}, year = 2016, } @inproceedings{CTT100705221, author = {Ahmed Awad and Atsushi Takahashi}, title = {A Lithographic Mask Manufacturability and Pattern Fidelity Aware OPC Algorithm}, booktitle = {Proc. International Symposium on VLSI Design, Automation and Test (VLSI-DAT 2016)}, year = 2016, } @inproceedings{CTT100703818, author = {Ahmed Awad and Atsushi Takahashi and Chikaaki Kodama}, title = {A Fast Manufacturability Aware Optical Proximity Correction (OPC) Algorithm with Adaptive Wafer Image Estimation}, booktitle = {Proc. Design, Automation and Test in Europe (DATE 2016)}, year = 2016, } @inproceedings{CTT100697246, author = {Ahmed Awad and Atsushi Takahashi}, title = {Mask Manufacturability Aware Post OPC Algorithm For Optical Lithography}, booktitle = {Proc. DA Symposium 2015, IPSJ Symposium Series}, year = 2015, } @inproceedings{CTT100684767, author = {Ahmed Awad and Atsushi Takahashi}, title = {A Fast Lithographic Mask Correction Algorithm}, booktitle = {IEICE Technical Report (VLD2014-153)}, year = 2015, } @inproceedings{CTT100678141, author = {Atsushi Takahashi and Ahmed Awad and Yukihide Kohira and Tomomi Matsui and Chikaaki Kodama and Shigeki Nojima and Satoshi Tanaka}, title = {[Invited] Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography}, booktitle = {Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)}, year = 2014, } @inproceedings{CTT100678140, author = {Ahmed Awad and Atsushi Takahashi and Satoshi Tanaka and Chikaaki Kodama}, title = {A Fast Process Variation and Pattern Fidelity Aware Mask Optimization Algorithm}, booktitle = {Proc. IEEE/ACM 2014 International Conference on Computer-Aided Design (ICCAD 2014)}, year = 2014, } @inproceedings{CTT100676102, author = {Ahmed Awad and Atsushi Takahashi and Satoshi Tanaka and Chikaaki Kodama}, title = {A Process Variability Band Area Reduction Algorithm For Optical Lithography}, booktitle = {Proc. the 2014 IEICE Society Conference (A-3-6)}, year = 2014, } @inproceedings{CTT100676100, author = {Ahmed Awad and Atsushi Takahashi and Satoshi Tanaka and Chikaaki Kodama}, title = {Mask Optimization With Minimal Number of Convolutions Using Intensity Difference Map}, booktitle = {Proc. DA Symposium 2014, IPSJ Symposium Series}, year = 2014, } @inproceedings{CTT100676099, author = {Ahmed Awad and Atsushi Takahashi and Satoshi Tanaka and Chikaaki Kodama}, title = {A New Intensity Based Edge Placement Error Optimization Algorithm for Optical Lithography}, booktitle = {Proc. the 27th Workshop on Circuits and Systems}, year = 2014, } @misc{CTT100711977, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, year = 2016, } @misc{CTT100726786, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, year = 2016, } @misc{CTT100711979, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, year = 2016, } @misc{CTT100711978, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, year = 2016, } @phdthesis{CTT100711977, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, school = {東京工業大学}, year = 2016, } @phdthesis{CTT100726786, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, school = {東京工業大学}, year = 2016, } @phdthesis{CTT100711979, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, school = {東京工業大学}, year = 2016, } @phdthesis{CTT100711978, author = {Ahmed Awad}, title = {Robust Lithographic Mask Generation For Advanced Technology Nodes}, school = {東京工業大学}, year = 2016, }