@inproceedings{CTT100590098, author = {村上晃浩 and 高 鉉龍 and 脇谷尚樹 and 木口賢紀 and Cross Jeffrey and 櫻井 修 and 篠崎和夫}, title = {PLD 法で製膜した蛍石型酸化物の残留応力の測定と制御}, booktitle = {第22回日本セラミックス協会 秋季シンポジウム講演予稿集}, year = 2009, } @inproceedings{CTT100590090, author = {A. Murakami and H.-Y. Go and N. Wakiya and T. Kiguchi and Jeffrey Cross and O. Sakurai and K. Shinozaki}, title = {Evaluation and Control of Residual Stress in Epitaxial Fluorite-Type-Oxide Thin Films Deposited on Si Substrates by PLD}, booktitle = {The 3rd International Conference on Science and Technology for Advanced Ceramics (STAC3).}, year = 2009, } @inproceedings{CTT100590084, author = {村上晃浩 and 脇谷尚樹 and 吉岡朋彦 and 田中順三 and 篠崎和夫}, title = {Si基板上に製膜した(001)エピタキシャルYSZ薄膜の残留応力の測定と制御}, booktitle = {日本セラミックス協会 2009年年会講演予稿集}, year = 2009, }