@article{CTT100588774, author = {杉田太郎 and 比田井洋史 and 戸倉和}, title = {ワイヤ放電スライスされたシリコンウェハのブラスト加工}, journal = {砥粒加工学会誌}, year = 2009, } @inproceedings{CTT100588776, author = {Hirofumi Hidai and Taro Sugita and Hitoshi Tokura}, title = {Blasting of Affected Layer of Silicon Surface Sliced by Wire EDM}, booktitle = {Advanced Materials Research}, year = 2009, }