@article{CTT100799578,
author = {Chunfu LIN and Takashi TANAKA and Akio NISHIYAMA and Tadashi SHIOTA and Osamu SAKURAI and Naoki WAKIYA and Kazuo SHINOZAKI and Kouichi YASUDA},
title = {Effect of deposition conditions and buffer layers on amorphous or polytype phase formation in Al2O3 thin films by chemical vapor deposition using tri-methyl aluminum},
journal = {J. Ceram. Soc. Japan},
year = 2019,
}
@inproceedings{CTT100590091,
author = {Takashi Tanaka and Naoki Wakiya and Akira Osada and Osamu Sakurai and Kazuo Shinozaki},
title = {Effect of [001] Oriented Cr2O3 Buffer Layer on Crystalline Al2O3 Thin Film},
booktitle = {The 3rd International Conference on Science and Technology for Advanced Ceramics (STAC3).},
year = 2009,
}
@inproceedings{CTT100565412,
author = {田中貴司 and 吉岡朋彦 and 脇谷尚樹 and 長田晃 and 田中順三 and 篠崎和夫},
title = {MOCVD法によるAl2O3薄膜の作製},
booktitle = {第24回日本セラミックス協会関東支部研究発表会},
year = 2008,
}