@inproceedings{CTT100597775, author = {Hiroto Nakayama and Kuniyuki KAKUSHIMA and Ahmet Parhat and E.Ikenaga and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Crystallographic Orientation Dependent Electrical Characteristics of La2O3 MOS Capacitors}, booktitle = {}, year = 2009, } @inproceedings{CTT100597925, author = {Hiroto Nakayama and Kuniyuki KAKUSHIMA and Ahmet Parhat and E.Ikenaga and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Crystallographic Orientation Dependent Electrical Characteristics of La2O3 MOS Capacitors}, booktitle = {}, year = 2009, } @inproceedings{CTT100585433, author = {中山寛人 and 日野雅文 and 永田晃基 and 小瀬村大亮 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 小椋厚志 and 服部健雄 and 岩井洋}, title = {As注入とSiN応力膜によるpoly-Siへの歪記憶の検討}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100830567, author = {H. Nakayama and K. Kakushima and P. Ahmet and K. Tsutsui and N. Sugii and T. Hattori and H. Iwai}, title = {Electrical Characteristics of La2O3 Gated MOS Capacitors with Different Wafer Orientation}, booktitle = {}, year = 2009, } @inproceedings{CTT100585114, author = {中山寛人 and 日野雅文 and 服部健雄 and 杉井信之 and 筒井一生 and パールハットアヘメト and 角嶋邦之 and 小椋厚志 and 永田 晃基 and 吉田 哲也 and 小瀬村大亮 and 岩井洋}, title = {Ar注入とSiN応力膜によるパターン付Si基板への歪記憶技術の検討}, booktitle = {応用物理学会}, year = 2008, }