@article{CTT100647650, author = {W. Feng and R. Hettiarachchi and Soshi Sato and Kuniyuki KAKUSHIMA and M. Niwa and HIROSHI IWAI and Keisaku Yamada and Kenji Ohmori}, title = {Advantages of Silicon Nanowire Metal-Oxide-Semiconductor Field-Effect Transistors over Planar Ones in Noise Properties}, journal = {Japanese Journal of Applied Physics}, year = 2012, } @article{CTT100647571, author = {Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and Kenji Ohmori and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Effects of corner angle of trapezoidal and triangular channel cross-sections on electrical performance of silicon nanowire field-effect transistors with semi gate-around structure}, journal = {Solid-State Electronics}, year = 2011, } @article{CTT100647572, author = {Soshi Sato and Kuniyuki KAKUSHIMA and Kenji Ohmori and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Electrical characteristics of asymmetrical silicon nanowire field-effect transistors}, journal = {APPLIED PHYSICS LETTERS}, year = 2011, } @article{CTT100625147, author = {Soshi Sato and Wei Li and Kuniyuki KAKUSHIMA and Kenji Ohmori and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Eatraction of additional interfacial states of silicon nanowire field-effect transistors}, journal = {APPLIED PHYSICS LETTERS}, year = 2011, } @article{CTT100621284, author = {Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and Kenji Ohmori and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Structural advantages of rectangular-like channel cross-section on electrical characteristics of silicon nanowire field-effect transistors}, journal = {Microelectronics Reliability}, year = 2011, } @article{CTT100621281, author = {DARYOUSH ZADEH and Soshi Sato and Kuniyuki KAKUSHIMA and A. Srivastava and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and C.K. Sarkar and HIROSHI IWAI}, title = {Effects of La2O3 incorporation in HfO2 gated nMOSFETs on low-frequency noise}, journal = {Microelectronics Reliability}, year = 2011, } @article{CTT100621278, author = {Soshi Sato and Kenji Ohmori and Kuniyuki KAKUSHIMA and Ahmet Parhat and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Experimental Characterization of Quasi-Fermi Pontential Profile in the Channel of a Silicon Nanowire Field-Effect Transistor with Four-Terminal Geometry}, journal = {Applied Physics Express}, year = 2011, } @article{CTT100607472, author = {Kuniyuki KAKUSHIMA and Kiichi Tachi and M.Adachi and Koichi Okamoto and Soshi Sato and Jaeyeol Song and Takamasa Kawanago and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Interface and electrical properties of La-silicate for direct contact of high-k with silicon}, journal = {Solid-State Electronics}, year = 2010, } @article{CTT100600446, author = {Kuniyuki KAKUSHIMA and Kiichi Tachi and Jaeyeol Song and Soshi Sato and Hiroshi Nohira and E. Ikenaga and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Comprehensive x-ray photoelectron spectroscopy study on compositional gradient lanthanum silicate film}, journal = {JOURNAL OF APPLIED PHYSICS}, year = 2009, } @article{CTT100586854, author = {Soshi Sato and Kiichi Tachi and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Thermal-stability improvement of LaON thin film formed using nitrogen radicals}, journal = {Microelectronic Engineering}, year = 2007, } @inproceedings{CTT100654573, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2013, } @inproceedings{CTT100654913, author = {W. Feng and R. Hettiarachchi and Yeonghun Lee and Soshi Sato and Kuniyuki KAKUSHIMA and M. Sato and K. Fukuda and M. Niwa and K. Yamabe and Kenji Shiraishi and HIROSHI IWAI}, title = {Fundamental origin of excellent low-noise property in 3D Si-MOSFETs ~Impact of charge-centroid in the channel due to quantum effect on 1/f noise ~}, booktitle = {}, year = 2013, } @inproceedings{CTT100654668, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Dependence of Interface-State Density on Three Dimensional Silicon Structure Measured by Charge-Pumping Method}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100654667, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Dependence of Interface-State Density on Three Dimensional Silicon Structure Measured by Charge-Pumping Method}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100657534, author = {大毛利健治 and W. Feng and R. Hettiarachchi and Yeonghun Lee and Soshi Sato and Kuniyuki KAKUSHIMA and M. Sato and K. Fukuda and M. Niwa and K. Yamabe and Kenji Shiraishi and HIROSHI IWAI and Keisaku Yamada}, title = {Low-frequency noise reduction in Si Nanowire MOSFETs}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100657196, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and HIROSHI IWAI and takeo hattori}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2012, } @inproceedings{CTT100657195, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and HIROSHI IWAI and takeo hattori}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2012, } @inproceedings{CTT100657536, author = {大毛利健治 and W. Feng and R. Hettiarachchi and Yeonghun Lee and Soshi Sato and Kuniyuki KAKUSHIMA and M. Sato and K. Fukuda and M. Niwa and K. Yamabe and Kenji Shiraishi and HIROSHI IWAI and Keisaku Yamada}, title = {Low-frequency noise reduction in Si Nanowire MOSFETs}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100657535, author = {大毛利健治 and W. Feng and R. Hettiarachchi and Yeonghun Lee and Soshi Sato and Kuniyuki KAKUSHIMA and M. Sato and K. Fukuda and M. Niwa and K. Yamabe and Kenji Shiraishi and HIROSHI IWAI and Keisaku Yamada}, title = {Low-frequency noise reduction in Si Nanowire MOSFETs}, booktitle = {ECS Transactions}, year = 2012, } @inproceedings{CTT100624047, author = {Kenji Ohmori and W. Feng and Soshi Sato and R. Hettiarachchi and M. Sato and T. Matsuki and Kuniyuki KAKUSHIMA and HIROSHI IWAI and Keisaku Yamada}, title = {Direct Real-Time Observation of Channel Potential Fluctuation, Correlated to Random Telegraph Noise of Drain Current Using Nanowire MOSFETs with Four-Probe Terminals}, booktitle = {}, year = 2011, } @inproceedings{CTT100622609, author = {Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and Kenji Ohmori and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Influence of the cross-sectional shape for Si nanowire FETs}, booktitle = {}, year = 2011, } @inproceedings{CTT100622683, author = {Naoto Shigemori and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {An effective suppression process for Ni silicide enchroachment into Si nanowire}, booktitle = {}, year = 2011, } @inproceedings{CTT100622684, author = {小山将央 and Naoto Shigemori and Hideaki Arai and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Lateral encroachment of Ni silicide into silicon nanowire}, booktitle = {}, year = 2011, } @inproceedings{CTT100622685, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Interface State Density Measurement of Three Dimensional Silicon Structures by Charge Pumping Method}, booktitle = {}, year = 2011, } @inproceedings{CTT100623966, author = {W. Feng and R. Hettiarachchi and Soshi Sato and Kuniyuki KAKUSHIMA and M. Niwa and HIROSHI IWAI and Keisaku Yamada and Kenji Ohmori}, title = {Advantages of Silicon Nanowire MOSFETs over Planar Ones Investigated from the Viewpoints of Static and Noise Properties}, booktitle = {}, year = 2011, } @inproceedings{CTT100623967, author = {Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and Kenji Ohmori and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Structural Effects of Channel Cross-section on a Gate Capacitance of Silicon Nanowire Field-Effect Transistors}, booktitle = {}, year = 2011, } @inproceedings{CTT100628839, author = {フェン ウェイ and ヘッティアーラッチ・ランガ and 佐藤創志 and 角嶋邦之 and M.Niwa and 岩井洋 and 山田啓作 and 大毛利健二}, title = {Advantages of Silicon Nanowire MOSFETs over Planar MOSFETs Investigated from the Aspect of Drain-Current Noise}, booktitle = {}, year = 2011, } @inproceedings{CTT100628846, author = {大毛利健二 and フェン ウェイ and 佐藤創志 and ヘッティアーラッチ・ランガ and 佐藤 基之 and 松木 武雄 and 角嶋邦之 and 岩井洋 and 山田啓作}, title = {ドレイン電流のランダムテレグラフノイズに相関したFETチャネルポテンシャル揺らぎの実時間直接観測}, booktitle = {}, year = 2011, } @inproceedings{CTT100631046, author = {佐藤創志 and 角嶋邦之 and パールハットアヘメト and 大毛利健治 and 名取研二 and 山田啓作 and 岩井洋}, title = {Effects of corners of channel cross-section on electrical performance of silicon nanowire field-effect transistors}, booktitle = {}, year = 2011, } @inproceedings{CTT100654916, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2011, } @inproceedings{CTT100613732, author = {Naoto Shigemori and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Suppression of Lateral Encroachment of Ni Silicide into Si Nanowires using Nitrogen Incorporation}, booktitle = {}, year = 2010, } @inproceedings{CTT100613735, author = {Y. Wu and Naoto Shigemori and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and 西山彰 and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Observation of Tunneling FET operation in MOSFET with NiSi/Si Schottky source/channel interface}, booktitle = {}, year = 2010, } @inproceedings{CTT100616070, author = {中島 一裕 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {チャージポンピング法による立体Si構造の界面準位密度の評価}, booktitle = {}, year = 2010, } @inproceedings{CTT100613533, author = {Soshi Sato and Yeonghun Lee and Kuniyuki KAKUSHIMA and Ahmet Parhat and Kenji Ohmori and KENJI NATORI and Keisaku Yamada and HIROSHI IWAI}, title = {Gate Semi-Around Si Nanowire FET Fabricated by Conventional CMOS Process with Very High Drivability}, booktitle = {}, year = 2010, } @inproceedings{CTT100616055, author = {呉研 and 茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {トンネルFET動作に向けたNiシリサイド/Si接触におけるトンネル電流の観測}, booktitle = {}, year = 2010, } @inproceedings{CTT100616058, author = {竇 春萌 and マイマイティ マイマイティレャアティ and ダリューシュザデ and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {希土類(Ce,Eu)酸化物MIM構造の抵抗スイッチング特性}, booktitle = {}, year = 2010, } @inproceedings{CTT100616068, author = {小山 将央 and 茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 西山彰 and 筒井一生 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {窒素導入によるSiナノワイヤ内へのNiシリサイド侵入抑制機構の検討}, booktitle = {}, year = 2010, } @inproceedings{CTT100613529, author = {角嶋邦之 and 小柳友常 and 来山大祐 and 幸田みゆき and 宋在烈 and 佐藤創志 and 川那子高暢 and M. マイマイティ and 舘喜一 and M.K. Bera and パールハットアヘメト and 野平博司 and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 山田啓作 and 岩井洋}, title = {LaCe シリケート膜を用いたEOT<0.7nm の直接接合 high-k/Si の実現とフラットバンド電圧制御}, booktitle = {,野平博司,筒井一生,西山彰,杉井信之,名取研二,服部健雄,山田啓作,岩井洋“LaCe シリケート膜を用いたEOT<0.7nm の直接接合 high-k/Si の実現とフラットバンド電圧制御” 応用物理学会分科会 シリコンテクノロジー No.127 pp.4-8(2010年7月22日 )}, year = 2010, } @inproceedings{CTT100608715, author = {佐藤創志 and 角嶋邦之 and パールハットアヘメト and 大毛利健二 and 名取研二 and 岩井洋 and 山田啓作}, title = {キャリア移動度評価によるシリコンナノワイヤトランジスタの電気特性解析}, booktitle = {電子情報通信学会技術研究報告 pp.11-16}, year = 2010, } @inproceedings{CTT100608701, author = {茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {SiナノワイヤへのNiシリサイド形成と過剰な侵入とその抑制に関する検討}, booktitle = {電子情報通信学会技術研究報告 pp.17-22}, year = 2010, } @inproceedings{CTT100603770, author = {佐藤創志 and 新井英朗 and 角嶋邦之 and パールハットアヘメト and 大毛利 健治 and 名取研二 and 岩井洋 and 山田啓作}, title = {Siナノワイヤトランジスタの電気特性の断面形状依存症}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603758, author = {ダリューシュ ザデ and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {界面にLa2O3 絶縁膜層を挿入したHf系high-kゲートMOSFETの評価}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100603768, author = {茂森直登 and 新井英朗 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 西山彰 and 筒井一生 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {酸化膜中のSiナノワイヤへのNi拡散の制御}, booktitle = {第57回応用物理学関係連合講演会講演予稿集}, year = 2010, } @inproceedings{CTT100630955, author = {佐藤創志 and 角嶋邦之 and パールハットアヘメト and 大毛利健治 and 山田啓作 and 名取研二 and 岩井洋}, title = {Influence of the cross-sectional shape for Si nanowire FETs}, booktitle = {}, year = 2010, } @inproceedings{CTT100630958, author = {茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 西山彰 and 筒井一生 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Suppression of Lateral Encroachment of Ni Silicide into Si Nanowires using Nitrogen Incorporation}, booktitle = {}, year = 2010, } @inproceedings{CTT100630960, author = {小山将央 and 茂森直登 and 新井英朗 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Lateral encroachment of Ni silicide into Si nanowire}, booktitle = {}, year = 2010, } @inproceedings{CTT100630961, author = {中島一裕 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Interface state density of 3-D structured Si using charge pumping method}, booktitle = {}, year = 2010, } @inproceedings{CTT100631006, author = {呉研 and 茂森直登 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 岩井洋}, title = {Observation of Tunneling FET operation in MOSFET with NiSi/Si Schottky source/channel interface}, booktitle = {}, year = 2010, } @inproceedings{CTT100597913, author = {Soshi Sato and Hideaki Arai and Kuniyuki KAKUSHIMA and Ahmet Parhat and HIROSHI IWAI}, title = {Evaluation of Channel Potential Profile of Si Nanowire Field Effect Transistor}, booktitle = {}, year = 2009, } @inproceedings{CTT100597926, author = {Hideaki Arai and Hideyuki Kamimura and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and 西山彰 and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Annealing Reaction for Ni Silicidation of Si Nanowire}, booktitle = {}, year = 2009, } @inproceedings{CTT100597761, author = {Hideaki Arai and Hideyuki Kamimura and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Annealing Reaction for Ni Silicidation of Si Nanowire}, booktitle = {}, year = 2009, } @inproceedings{CTT100597754, author = {Soshi Sato and Hideyuki Kamimura and Hideaki Arai and Kuniyuki KAKUSHIMA and Ahmet Parhat and Kenji Ohmori and Keisaku Yamada and HIROSHI IWAI}, title = {High-Performance Si Nanowire FET with a Semi Gate-Around Structure Suitable for Integration}, booktitle = {}, year = 2009, } @inproceedings{CTT100585291, author = {岩井洋 and 山田啓作 and 大毛利健二 and 筒井一生 and 角嶋邦之 and パールハットアヘメト and 佐藤創志 and 上村英之 and 新井英朗}, title = {トップダウンSiナノワイヤFETの作製法とその電気的特性のサーベイ}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585426, author = {新井英朗 and 上村英之 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {SiナノワイヤへのNiシリサイド形成の評価}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100585423, author = {佐藤創志 and 上村英之 and 新井英朗 and 角嶋邦之 and パールハットアヘメト and 大毛利健二 and 筒井一生 and 杉井信之 and 服部健雄 and 山田啓作 and 岩井洋}, title = {四端子測定TEGを用いたSiナノワイヤトランジスタのチャネル内電位の測定}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100586495, author = {Hideyuki Kamimura and Hideaki Arai and Soshi Sato and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Evaluation of Lateral Ni Diffusion in Si Nanowire Schottky Contact}, booktitle = {ISTC /CSTIC2009}, year = 2009, } @inproceedings{CTT100585100, author = {佐藤創志 and 上村英之 and 新井英朗 and 大毛利健二 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 服部健雄 and 杉井信之 and 山田啓作 and 岩井洋}, title = {Si Finのアスペクト比最適化により作製した円形Siナノワイヤの形状に関する研究}, booktitle = {秋季第69回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576517, author = {新井英朗 and 上村英之 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 服部健雄 and 杉井信之 and 岩井洋}, title = {熱酸化によるSi ナノワイヤの作製とその電気特性}, booktitle = {応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100576381, author = {岡本晃一 and 舘喜一 and 足立学 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 杉井信之 and 筒井一生 and 服部健雄 and 岩井洋}, title = {Hf O2系 High-kゲートMOSFETの電気特性に対するLa2O3界面層挿入効果}, booktitle = {春季第55回応用物理学会学術講演会 予稿集}, year = 2008, } @inproceedings{CTT100576380, author = {足立学 and 岡本晃一 and 舘喜一 and 佐藤創志 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {HfO2/ La2O3積層キャパシタにおけるLa2O3層に依存した界面層成長抑制の効果}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100599990, author = {佐藤創志 and 舘喜一 and 宋在烈 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {ラジカル窒化によるLa2O3ゲート絶縁膜への窒素導入効果 : 堆積時窒化によるEOT増加抑制効果(ゲート絶縁膜、容量膜、機能幕及びメモリ技術)}, booktitle = {電子情報通信学会技術研究報告、SDM、シリコン材料・デバイス}, year = 2007, } @misc{CTT100725936, author = {Soshi Sato}, title = {A study on electrical characteristics of silicon nanowire field effect transistors}, year = 2011, } @phdthesis{CTT100725936, author = {Soshi Sato}, title = {A study on electrical characteristics of silicon nanowire field effect transistors}, school = {東京工業大学}, year = 2011, }