@inproceedings{CTT100661552, author = {中村玲王奈 and 桂智毅 and 藤川周一 and 真柄卓司 and 稲川貴大 and 青野祐子 and 戸倉和}, title = {パルスCO2レーザを用いたガラス微細穴形成技術}, booktitle = {2013年度精密工学会春季大会学術講演会講演論文集}, year = 2013, } @inproceedings{CTT100647923, author = {Tomotaka Katsura and Reona Nakamura and Shinichi Fujikawa and Takuji Magara and Takahiro Inagawa and Yuko Aono and Hitoshi Tokura}, title = {High-Speed Drilling Through-Holes in Borosilicate Glass Substrate by High-Peak-Power CO2 Laser}, booktitle = {}, year = 2012, }