@inproceedings{CTT100608407, author = {Hayato Yoshioka and Hiroyuki Kobayashi and Hiroshi Sawano and Hidenori Shinno}, title = {Development of Steel Belt-Driven XY Positioning Table System}, booktitle = {Proceedings of 2010 International Symposium on Flexible Automation(ISFA), CD-ROM}, year = 2010, }