@inproceedings{CTT100576364, author = {Tomohiro Shinagawa and Shinsuke Miyajima and Akira Yamada and Makoto Konagai}, title = {LOW TEMPERATURE DEPOSITION OF ALMINNUM DOPED HYDROGENATED NANO CRYSTALLINE CUBIC SILICON CARBIDE FOR THE WINDOW LAYER OF SILICON-BASED THIN-FILM SOLAR CELLS WITH A WIDEGAP I-LAYER}, booktitle = {}, year = 2009, } @inproceedings{CTT100544398, author = {品川友宏 and 澤村 誠 and 宮島晋介 and 山田 明 and 小長井 誠}, title = {VHFプラズマCVD法によるn型ナノ結晶SiC:H薄膜の低温堆積}, booktitle = {第68回応用物理学会秋季学術講演会}, year = 2007, }