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韓熙成 研究業績一覧 (4件)
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国内会議発表 (査読なし・不明)
学位論文
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A study on ultrathin hafnium nitride gate insulator formed by ECR plasma sputtering,
Summary,
Doctor (Engineering),
Tokyo Institute of Technology,
2013/06/30,
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A study on ultrathin hafnium nitride gate insulator formed by ECR plasma sputtering,
Exam Summary,
Doctor (Engineering),
Tokyo Institute of Technology,
2013/06/30,
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A study on ultrathin hafnium nitride gate insulator formed by ECR plasma sputtering,
Thesis,
Doctor (Engineering),
Tokyo Institute of Technology,
2013/06/30,
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