@inproceedings{CTT100615024,
  author = {Masato Ishibashi and Ryo Tanabe and Tadahiko Shinshi and Minoru Uehara},
  title = {Electromagnetic-Force-Driving Type Mems Switch Using High Performance NdFeB/Ta Thin Film Permanent Magnet},
  booktitle = {Proceedings of The Twenty-fifth Annual Meeting of The American Society for Precision Engineering},
  year = 2010,
}

@inproceedings{CTT100605214,
  author = {石橋正登 and 田辺亮 and 進士忠彦 and 上原 稔},
  title = {高性能薄膜永久磁石を用いた電磁力駆動型RF-MEMSスイッチ},
  booktitle = {第22回「電磁力関連のダイナミクス」シンポジウム 講演論文集},
  year = 2010,
}

@inproceedings{CTT100592067,
  author = {上原稔 and 田辺亮 and 櫻井淳平 and 進士忠彦},
  title = {Nd2Fe14B基永久磁石薄膜の内部応力低減化技術の検討},
  booktitle = {第33回日本磁気学会講演会概要集},
  year = 2009,
}

@inproceedings{CTT100591879,
  author = {Sen Yao and Shunji Goto and Ryo Tanabe and Tadahiko Shinshi and Minoru Uehara and Hitoshi Yamamoto},
  title = {Positioning Control of a Cantilever Type Micro Actuator Using High-performance NdFeB/Ta Thin Film Magnets and Built-in Displacement Sensor},
  booktitle = {Proceedings of the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment},
  year = 2009,
}

@inproceedings{CTT100592066,
  author = {田辺 亮 and 後藤駿治 and ＳＥＮ ＹＡＯ and 進士忠彦 and 上原稔 and 山本日登志},
  title = {高性能薄膜ネオジム永久磁石を用いた２自由度駆動型マイクロアクチュエータ},
  booktitle = {第21回｢電磁力関連のダイナミクス｣シンポジウム講演論文集},
  year = 2009,
}

@inproceedings{CTT100591958,
  author = {後藤俊治 and 田辺亮 and Yao Sen and 櫻井淳平 and 進士忠彦 and 上原 稔 and 山本 日登志},
  title = {高性能薄膜ネオジム永久磁石を用いた片持ばり型マイクロアクチュエータの変位測定と位置決め制御},
  booktitle = {2009年度精密工学会春季大会学術講演会講演論文集},
  year = 2009,
}