@article{CTT100648588,
  author = {Junpei Matsuzaki and Chiemi Ishiyama and Masato Sone and Yakichi Higo},
  title = {Effects of Chemical Components on the Bending Properties of Micro-sized Cantilevers in three types of SU-8},
  journal = {Microelectronic Engineering},
  year = 2013,
}

@inproceedings{CTT100640076,
  author = {Junpei Matsuzaki and Chiemi Ishiyama and Masato Sone and Yakichi Higo},
  title = {Effects of Chemical Components on the Bending Properties of Micro-sized Cantilevers in SU-8},
  booktitle = {38th International Conference on Micro and Nano Engineering, (MNE2012)},
  year = 2012,
}

@inproceedings{CTT100508038,
  author = {石山 千恵美 and 松崎 純平 and 曽根 正人 and 肥後 矢吉},
  title = {MEMS用フォトレジストのマイクロサイズ曲げ特性に及ぼす露光量の影響},
  booktitle = {第55回高分子討論会予稿集},
  year = 2006,
}