@inproceedings{CTT100633303,
  author = {Yuuki Hashizume and Yasumitsu Miyake and Akihiro Matsutani and Hideo Ohtsuki and Fumio Koyama},
  title = {Fabrication and characterization of Si/SiO2 high contrast grating using nanoimprint lithography},
  booktitle = {},
  year = 2012,
}