@inproceedings{CTT100472355,
  author = {M. K. Kurosawa and T. Nakashita and H. Nanzawa and T. Shigematsu and K. Asai},
  title = {Surface acoustic wave motor using silicon slider and energy circulation stator},
  booktitle = {Proc. of Actuator 2002},
  year = 2002,
}