@article{CTT100588561, author = {D.S. Ang and Y.C. Ong and S.J. O'Shea and K.L. Pey and Kuniyuki KAKUSHIMA and HIROSHI IWAI}, title = {Study of trap generation in the Sc2 O 3/La2O3/SiOxgate dielectric stack by scanning tunneling microscopy}, journal = {APPLIED PHYSICS LETTERS}, year = 2008, }