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研究業績一覧 (1件)
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論文
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KAZUO TSUTSUI,
T. Shiozawa,
K. Nagahiro,
Y. Ohishi,
Kuniyuki KAKUSHIMA,
Ahmet Parhat,
N. Urushihara,
M. Suzuki,
HIROSHI IWAI.
Improvement of Thermal Stability of Ni Silicide on N+-Si by Direct Deposition of Group III Element (Al, B) Thin Film at Ni/Si Interface,
Microelectronic Engineering,
Vol. 85,
pp. 2000-2004,
2008.
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