@article{CTT100588871,
  author = {KAZUO TSUTSUI and T. Shiozawa and K. Nagahiro and Y. Ohishi and Kuniyuki KAKUSHIMA and Ahmet Parhat and N. Urushihara and M. Suzuki and HIROSHI IWAI},
  title = {Improvement of Thermal Stability of Ni Silicide on N+-Si by Direct Deposition of Group III Element (Al, B) Thin Film at Ni/Si Interface},
  journal = {Microelectronic Engineering},
  year = 2008,
}