@article{CTT100588896, author = {N. Urushihara and S. Iida and N. Sanada and M. Suzuki and D.F. Paul and S. Bryan and Y. Nakajima and T. Hanajiri and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and HIROSHI IWAI}, title = {Three dimensional image construction and spectrum extraction from two dimensional elemental mapping in Auger electron spectroscopy}, journal = {JOURNAL OF VACUUM SCIENCE & TECHNOLOGY}, year = 2008, }