@inproceedings{CTT100577062, author = {Youichiro. Kurita and N. Motohashi and S. Matsui and K. Soejima and S. Amakawa and K. Masu and M. Kawano}, title = {SMAFTI Packaging Technology for New Interconnect Hierarchy}, booktitle = {International Interconnect Technology Conference (IITC)}, year = 2009, }