@inproceedings{CTT100593542, author = {Joao Gasper and CHIEMI ISHIYAMA and Masato Sone and YAKICHI HIGO and Oliver Paul}, title = {Characterization of the Elastic Properties of SU-8 Microposts and Their Adhesion Strength to Silicon Substrates}, booktitle = {Proceedings of MRS fall meeting 2009}, year = 2009, }