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研究業績一覧 (1件)
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国際会議発表 (査読有り)
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Akira Uedono,
KAZUO TSUTSUI,
Shoji Ishibashi,
Hiromichi Watanabe,
Shoji Kubota,
Kazuki Tenjinbayashi,
Yasumasa Nakagawa,
Bunji Mizuno,
takeo hattori,
HIROSHI IWAI.
Vacancy-Type Defects in Ultra-Shallow Junctions Fabricated Using Plasma Doping Studied by Positron Annihilation,
IEEE IWJT 2010 Extended Abstracts 2010 International Workshop on Junction Technology,
May 2010.
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