@inproceedings{CTT100613728, author = {M.Bera and Ahmet Parhat and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and Nobuyuki Sugii and 西山彰 and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Yttrium-Titanium Oxide High-k Gate Dielectric on Ge}, booktitle = {}, year = 2010, }