@article{CTT100615257, author = {Kanetake Takasaki and Kiyoshi Irino and Takayuki Aoyama and Youichi Momiyama and Toshiro Nakanishi and Yasuyuki Tamura and Takashi Ito}, title = {Impact of Nitrogen Profile in Gate Nitrided-Oxide on Deep-Submicron CMOS Performance and Reliability}, journal = {Fujitsu Sci. and Tech. Jour.}, year = 2003, } @article{CTT100634586, author = {Kanetake Takasaki and Kiyoshi Irino and Takayuki Aoyama and Youichi Momiyama and Toshiro Nakanishi and Yasuyuki Tamura and Takashi Ito}, title = {Impact of Nitrogen Profile in Gate Nitrided-Oxide on Deep-Submicron CMOS Performance and Reliability}, journal = {FUJITSU SCIENTIFIC & TECHNICAL JOURNAL}, year = 2003, }