@article{CTT100615257,
  author = {Kanetake Takasaki and Kiyoshi Irino and Takayuki Aoyama and Youichi Momiyama and Toshiro Nakanishi and Yasuyuki Tamura and Takashi Ito},
  title = {Impact of Nitrogen Profile in Gate Nitrided-Oxide on Deep-Submicron CMOS Performance and Reliability},
  journal = {Fujitsu Sci. and Tech. Jour.},
  year = 2003,
}

@article{CTT100634586,
  author = {Kanetake Takasaki and Kiyoshi Irino and Takayuki Aoyama and Youichi Momiyama and Toshiro Nakanishi and Yasuyuki Tamura and Takashi Ito},
  title = {Impact of Nitrogen Profile in Gate Nitrided-Oxide on Deep-Submicron CMOS Performance and Reliability},
  journal = {FUJITSU SCIENTIFIC & TECHNICAL JOURNAL},
  year = 2003,
}

@article{CTT100634579,
  author = {Takayuki Aoyama and Kunihiro Suzuki and Hiroko Tashiro and Yoko Toda and Tatsuya Yamazaki and Kanetake Takasaki and Takashi Ito},
  title = {Effect of Fluorine on Boron Diffusion in Thin Silicon Dioxides and Oxynitride},
  journal = {Journal of Applied Physics},
  year = 1994,
}

@article{CTT100634574,
  author = {Takayuki Aoyama and Kunihiro Suzuki and Hiroko Tashiro and Tatsuya Yamazaki and Yoshihiro Arimoto and Takashi Ito},
  title = {Boron Diffusion Through Pure Silicon Oxide and Oxynitride for Metal-Oxide-Semiconductor Devices},
  journal = {Journal of The Electrochemical Society},
  year = 1993,
}

@article{CTT100634571,
  author = {Takayuki Aoyama and Tatsuya Yamazaki and Takashi Ito},
  title = {Silicon Surface Cleaning Using Photoexcited Fluorine Gas Diluted with Hydrogen},
  journal = {Journal of The Electrochemical Society},
  year = 1993,
}

@article{CTT100634569,
  author = {Takayuki Aoyama and Tatsuya Yamazaki and Takashi Ito},
  title = {Surface Cleaning for Si Epitaxy Using Photoexcited Fluorine Gas},
  journal = {Journal of The Electrochemical Society},
  year = 1993,
}

@article{CTT100634558,
  author = {Takayuki Aoyama and Tatsuya Yamazaki and Takashi Ito},
  title = {Nonuniformities of Native Oxide on Si(001) Surfaces Formed during Wet Chemical Cleaning},
  journal = {Applied Phisics Letters},
  year = 1992,
}

@article{CTT100634562,
  author = {Hiroki Ogawa and Naozumi Terada and Kazuhisa Sugiyama and Kazunori Moriki and Noriyuki Miyata and Takayuki Aoyama and Rinshi Sugino and Takashi Ito and Takeo Hattori},
  title = {Silicon-Hydrogen Bonds in Silicon Oxide Near the SiO2/Si Interface},
  journal = {Applied Surface Science},
  year = 1992,
}

@article{CTT100634548,
  author = {Takayuki Aoyama and Tatsuya Yamazaki and Takashi Ito},
  title = {Removing Native Oxide from Si (001) Surfaces using Photoexcited Fluorine Gas},
  journal = {Applied Phisics Letters},
  year = 1991,
}

@article{CTT100634543,
  author = {Kazuhisa Sugiyama and Takayuki lgarashi and Kazunori Moriki and Yoshikatsu Nagasawa and Takayuki Aoyama and Rinshi Sugino and Takashi Ito and Takeo Hattori},
  title = {Silicon-Hydrogen Bonds in Native Oxides Formed During Wet Chemical   Treatments},
  journal = {Japanese Journal of Applied Physics},
  year = 1990,
}

@article{CTT100634561,
  author = {Tatsuya Yamazaki and Norio Miyata and Takayuki Aoyama and Takashi Ito},
  title = {Investigation of Thermal Removal of Native Oxide from Si (100) Surfaces in Hydrogen for Low-Temperature Si CVD Epitaxy},
  journal = {Journal of The Electrochemical Society},
  year = 1990,
}

@article{CTT100634547,
  author = {Toshihiro Sugii and Takayuki Aoyama and Takashi Ito},
  title = {Low-Temperature Growth of SiC on Si by Gas-Source MBE},
  journal = {Journal of The Electrochemical Society},
  year = 1990,
}

@article{CTT100634540,
  author = {Takayuki Aoyama and Toshihiro Sugii and Takashi Ito},
  title = {Determination of Band Line-up in βSiC/Si Heterojunction for Si-HBTs},
  journal = {Applied Surface Science},
  year = 1989,
}

@article{CTT100634542,
  author = {Toshihiro Sugii and Takayuki Aoyama and Takashi Ito},
  title = {Polycrystalline SiC for A Wide-Gap Emitter of Si-HBTs},
  journal = {Journal of The Electrochemical Society},
  year = 1989,
}

@inproceedings{CTT100634716,
  author = {Takayuki Aoyama and Tatsuya Yamazaki and Takashi Ito},
  title = {Surface Cleaning for Silicon Epitaxy Using Photoexcited Fluorine Gas},
  booktitle = {Proc. of MRS Symposium},
  year = 1993,
}

@inproceedings{CTT100634710,
  author = {Takashi Ito and Rinshi Sugino and Yasuhiro Sato and Masaki Okuno and Akira Osawa and Takayuki Aoyama and Tatsuya Yamazaki and Yoshihiro Arimoto},
  title = {Photo-Excited Cleaning of Silicon with Chlorine and Fluorine},
  booktitle = {MRS Symp. Proceeding},
  year = 1992,
}

@inproceedings{CTT100634682,
  author = {Toshihiro Sugii and Takayuki Aoyama and Yuji Furumura and Takashi Ito},
  title = {SiC Growth   and Its Application to Si-HBTs},
  booktitle = {Proc. of American Vacuum Society Topical Symp. on Si Based Heterostructures},
  year = 1990,
}

@inproceedings{CTT100634683,
  author = {Kazuhisa Sugiyama and Takayuki lgarashi and Kazunori Moriki and Yoshikatsu Nagasawa and Takayuki Aoyama and Rinshi Sugino and Takashi Ito and Takeo Hattori},
  title = {Silicon-   Hydrogen Bonds in Native Oxides Formed During Wet Chemical Treatments},
  booktitle = {Ext.   Abst. of Int. Conf. on SSDM},
  year = 1990,
}

@inproceedings{CTT100634657,
  author = {Takayuki Aoyama and Toshihiro Sugii and Takashi Ito},
  title = {Determination of Band Lineup In β-SiC/Si Hetero Junction for HBTs},
  booktitle = {Abs. 2nd Int. Conf. on Formation of Semiconductor Interfaces},
  year = 1988,
}