@article{CTT100615317,
  author = {Hisakazu Miyatake and Takashi Ito},
  title = {Improvement of ArF Photo Resist Pattern by VUV Cure},
  journal = {IEICE Transactions on Electronics},
  year = 2007,
}

@inproceedings{CTT100615433,
  author = {Hisakazu Miyatake and Takashi Ito},
  title = {ArF Photo Resist Pattern Improvement by VUV Cure”, 2006 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices},
  booktitle = {2006 Asia-Pacific Workshop on Fundamentals and Application of Advanced Semiconductor Devices (AWAD2006)},
  year = 2006,
}