@article{CTT100615409,
  author = {Katsumasa Suzuki and Yoshio Ishihara and Kaoru Sakoda and Yasuyuki Shirai and Akinobu Teramoto and Masaki Hirayama and Tadahiro Ohmi and Takayuki Watanabe and Takashi Ito},
  title = {Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system},
  journal = {J. Vac. Sci. Technol. A},
  year = 2009,
}

@article{CTT100615370,
  author = {Katsumasa Suzuki and Yoshio Ishihara and Kaoru Sakoda and Yasuyuki Shirai and Akinobu  Teramoto and Masaki Hirayama and Tadahiro Ohmi and Takayuki Watanabe and Takashi Ito},
  title = {High-Efficiency PFC Abatement System Utilizing High-Efficiency PFC Abatement System Utilizing Immobilization},
  journal = {IEEE Trans. on Semicon. Manufacturing},
  year = 2008,
}

@article{CTT100615344,
  author = {Tadahiro Ohmi and Hiraku ISHIKAWA and Toshihisa NOZAWA and Takaaki MATSUOKA and Akinobu TERAMOTO and Masaki HIRAYAMA and Takashi ITO and Tadahiro OHMI},
  title = {Evaluation of New Amorphous Hydrocarbon Film for Copper Barrier Dielectric Film in Low-k Copper Metallization},
  journal = {Japanese Journal of Applied Physics},
  year = 2008,
}